Thin Film PiezoMEMS and Optics
Category
Conference lecture
Language
English
Author(s)
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
- UiT The Arctic University of Norway
Presented at
PiezoMEMS 2022
Place
Pennsylvania
Date
15.08.2022 - 17.08.2022
Organizer
University of Pennsylvania
Year
2022View this publication at Norwegian Research Information Repository