Silicon Metalens Fabrication from Electron Beam to UV-Nanoimprint Lithography

Client

• EEA - The Agreement on the European Economic Area / 323322

Author(s)

• Angela Baracu
• Marius Andrei Avram
• Carmen Breazu
• Mihaela-Cristina Bunea
• Marcela Socol
• Anca Stanculescu
• Elena Matei
• Paul Conrad Vaagen Thrane
• Christopher Andrew Dirdal
• Adrian Dinescu
• Oana Rasoga

Affiliation

• Romania
• SINTEF Digital / Smart Sensors and Microsystems

Issue

9

DOI

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