Thermal management of MEMS element with thermoelectric-cooler
Category
Academic chapter/article/Conference paper
Language
English
Author(s)
- Daniel Nilsen Wright
- Alessandro Liberale
- Andreas Vogl
- Niels Aakvaag
- Guillaume Savelli
- Fabien Filhol
- Romain Hodot
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
- CEA-Liten
- Thalesgroup
Year
2021Publisher
IEEE (Institute of Electrical and Electronics Engineers)
Book
Proceedings of 2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)
ISBN
978-0-9568086-7-7