Surface energy of fusion bonded silicon nitride to silicon
Category
Academic lecture
Language
English
Author(s)
- Kjersti Midtbø
- Kari Schjølberg-Henriksen
- Maaike Margrete Visser Taklo
- Arne Rønnekleiv
Affiliation
- Norwegian University of Science and Technology
- SINTEF Digital / Microsystems and Nanotechnology
Presented at
207th meeting of the electrochemical society
Place
Quebec
Date
15.05.2005 - 20.05.2005
Organizer
The electrochemical society