Effect of the native oxide on the Surface Passivation of Si by Al2O3
Read publication
Category
Academic article
Client
- Research Council of Norway (RCN) / 295864
- Research Council of Norway (RCN) / 289437
Language
English
Author(s)
- Michael Getz
- Marco Povoli
- Eduard Monakhov
Affiliation
- University of Oslo
- SINTEF Digital / Smart Sensors and Microsystems
Year
2021Published in
Journal of Applied Physics
ISSN
0021-8979
Publisher
AIP Publishing (American Institute of Physics)
Volume
129
Issue
20