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Effect of the native oxide on the Surface Passivation of Si by Al2O3

Category

Academic article

Client

  • Research Council of Norway (RCN) / 295864
  • Research Council of Norway (RCN) / 289437

Language

English

Author(s)

Affiliation

  • University of Oslo
  • SINTEF Digital / Microsystems and Nanotechnology

Year

2021

Published in

Journal of Applied Physics

ISSN

0021-8979

Publisher

AIP Publishing (American Institute of Physics)

Volume

129

Issue

20

View this publication at Cristin