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Effect of the native oxide on the Surface Passivation of Si by Al2O3

Effect of the native oxide on the Surface Passivation of Si by Al2O3

Category
Academic article
Language
English
Author(s)
Affiliation
  • University of Oslo
  • SINTEF Digital / Microsystems and Nanotechnology
Year
Published in
Journal of Applied Physics
ISSN
0021-8979
Publisher
AIP Publishing (American Institute of Physics)