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PiezoMEMS reliability: why the electrode-material matters in humid ambient

PiezoMEMS reliability: why the electrode-material matters in humid ambient

Category
Academic lecture
Client
  • Research Council of Norway (RCN) / NBRIX: Prosjektnummer: 247781
  • Research Council of Norway (RCN) / NBRIX: PROSJEKTNUMMER: 247781
Language
English
Author(s)
Affiliation
  • Norwegian University of Science and Technology
  • Unknown
  • SINTEF Industry / Sustainable Energy Technology
  • SINTEF Digital / Microsystems and Nanotechnology
Presented at
IEEE IEEE International Symposium on Applications of Ferroelectrics (ISAF), 2019
Place
Lausanne
Date
14.07.2019 - 19.07.2019
Organizer
IEEE
Year