PiezoMEMS reliability: why the electrode-material matters in humid ambient
Category
Conference lecture
Language
English
Author(s)
- Runar Dahl-Hansen
- Betul Akkopru-Akgun
- Lyndsey Denis
- Kathleen Coleman
- Jonathan M. Polfus
- Einar Vøllestad
- Frode Tyholdt
- Susan E Trolier-Mckinstry
- Per Thomas Martin Tybell
Affiliation
- SINTEF Industry / Sustainable Energy Technology
- SINTEF Digital / Smart Sensors and Microsystems
- Norwegian University of Science and Technology
Presented at
IEEE IEEE International Symposium on Applications of Ferroelectrics (ISAF), 2019
Place
Lausanne
Date
14.07.2019 - 19.07.2019
Organizer
IEEE
Year
2019View this publication at Norwegian Research Information Repository