Abstract
In the course of this research, a radiation damage study of 3D microdosimeter structures were carried out using 5.5 MeV He2+ and 24 MeV C-12 ions microbeam. Radiation damage study post irradiation of the microdosimeters with low energy Li, C, O, ti ion was also investigated. Additionally, electrical and charge collection properties were studied for a new 3D SV microdosimeter covered with a tissue equivalent material.