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Breakdown mechanisms and passivation of piezoelectric micro-mirrors

Abstract

Lead Zirconate Titanate (Pb(Zrx,Ti1−x )O3) is, due to its high piezoresponse, widely used in piezoelectric Micro Electro Mechanical Systems (piezoMEMS) such as accelerometers, gyroscopes and actuators. However, since PZT is highly sensitive to humidity, devices tend to suffer severe degradation when operated under realistic or harsh conditions. The humidity-related breakdown mechanisms are many and complex, making the need for passivation critical in order to ensure reliable and long-lived piezoMEMS-devices.

Category

Conference lecture

Language

English

Author(s)

Affiliation

  • SINTEF Digital / Smart Sensors and Microsystems
  • Norwegian University of Science and Technology

Presented at

NanoNetwork 2017

Place

Bergen

Date

12.06.2018 - 14.06.2018

Organizer

Norwegian University of Science and Technology (NTNU)

Year

2018

View this publication at Norwegian Research Information Repository