2D PZT based micromirrors with high resonance frequency or high angular deflection
Category
Poster
Client
- Research Council of Norway (RCN) / 282086
Language
English
Author(s)
- Jo Gjessing
- Thor Bakke
- Skokic Zeljko
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
- Unknown
Presented at
Norsk Elektrooptikkonferanse
Place
Henningsvær
Date
02.05.2018 - 04.05.2018