FP7 piezoVolume - High Volume Piezoelectric Thin Film Production Process For Microsystems
Category
Academic lecture
Language
English
Author(s)
- Frode Tyholdt
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
Presented at
piezoMEMS 2010
Place
Aachen
Date
18.05.2010 - 19.05.2010
Organizer
aixACCT og EPFL