Scaling properties and MEMS implementation of acoustic gas sensors
Category
Academic lecture
Language
English
Author(s)
- Bertil Hök
- Anders Blückert
- Vegar Dalsrud
- Per Gerhard Gløersen
- Geir Uri Jensen
- Daniel Lapadatu
- Andreas Vogl
- Dag Thorstein Wang
- Trond Inge Westgaard
- Per Åkerlund
- Niels Peter Østbø
Affiliation
- Unknown
- SINTEF Digital / Smart Sensors and Microsystems
Presented at
Micro Structure Workshop 2004
Place
Ystad
Date
30.03.2004 - 31.03.2004