To main content

Nonlinear model predictive control of the Czochralski Process

Nonlinear model predictive control of the Czochralski Process

Category
Academic article
Abstract
Commercially, the Czochralski process is the most commonly applied method for production of monocrystalline silicon for semiconductor and solar cell applications. The process has traditionally been controlled using nested single-loop controllers. Due to the complex and nonlinear nature of the Cz process, this paper considers model-based control of the process with application of nonlinear model predictive controllers.
Language
English
Author(s)
  • Parsa Rahmanpour
  • Steinar Sælid
  • Morten Hovd
  • Oddvar Grønning
  • Moez Jomâa
Affiliation
  • Norwegian University of Science and Technology
  • Prediktor
  • SINTEF Industry / Metal Production and Processing
Year
Published in
IFAC-PapersOnLine
ISSN
2405-8963
Publisher
Elsevier
Volume
49
Issue
20
Page(s)
120 - 125