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3D MEMS and IC Integration

3D MEMS and IC Integration

Category
Academic lecture
Language
English
Author(s)
Affiliation
  • SINTEF Digital / Microsystems and Nanotechnology
Presented at
MRS fall meeting (Symposium E: Materials and Technologies for 3-D Integration)
Place
Boston-MA
Date
01.12.2008 - 05.12.2008
Organizer
MRS
Year