Abstract
A highly planar, robust 2D mirror with piezoelectric actuation is presented. The mirror can be operated in a wide frequency range including static deflection. It is ideally suited for target tracking and free-space optical communication
A robust, non-resonant piezoelectric micromirror
Category
Academic lecture
Language
English
Author(s)
- Thor Bakke
- Ib-Rune Johansen
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
Presented at
2011 International Conference on Optical MEMS & Nanophotonics
Place
Istanbul, Tyrkia
Date
08.08.2011 - 11.08.2011
Organizer
IEEE