Fabrication of Full 3D Active Edge Sensors
Single-sided 3D sensor prototype with active edges has been under development at SINTEF MiNaLab since 2007. A third prototype type run is now near completion and will yield large sensors compatible with the ATLAS FE-I4 readout chips. This presentation will give a summary of the on-going 3D fabrication development at SINTEF. Electrical measurements and yield issues will also be discussed.
- SINTEF Digital / Microsystems and Nanotechnology
6th Trento Workshop on Advanced Radiation Detectors (3D and P-type Technologies)
02.03.2011 - 04.03.2011
Fondazione Bruno Kessler