Electrical, Mechanical, and Hermeticity Properties of Low-Temperature, Plasma Activated Direct Silicon Bonded Joints
Category
Academic lecture
Client
- Research Council of Norway (RCN) / 2210601
Language
English
Author(s)
- Kari Schjølberg-Henriksen
- Nishant Malik
- Elin Vold Gundersen
- Oscar Rincon Christiansen
- Kristin Imenes
- Sigurd Moe
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
- University of Oslo
- University of South-Eastern Norway
Presented at
The 226th Meeting of the Electrochemical Society
Place
Cancun
Date
05.10.2014 - 09.10.2014
Organizer
The Electrochemical Society