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Electrical, Mechanical, and Hermeticity Properties of Low-Temperature, Plasma Activated Direct Silicon Bonded Joints

Category

Academic lecture

Client

  • Research Council of Norway (RCN) / 2210601

Language

English

Author(s)

  • Kari Schjølberg-Henriksen
  • Nishant Malik
  • Elin Vold Gundersen
  • Oscar Rincon Christiansen
  • Kristin Imenes
  • Sigurd T. Moe

Affiliation

  • SINTEF Digital / Smart Sensors and Microsystems
  • University of Oslo
  • University of South-Eastern Norway

Presented at

The 226th Meeting of the Electrochemical Society

Place

Cancun

Date

05.10.2014 - 09.10.2014

Organizer

The Electrochemical Society

Year

2014

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