Leak Rates and Residual Gas Pressure in Cavities Sealed by Metal Thermo-Compression Bonding and Silicon Direct Bonding
Category
Academic lecture
Client
- Research Council of Norway (RCN) / 210601
Language
English
Author(s)
- Kari Schjølberg-Henriksen
- Nishant Malik
- Åsmund Sandvand
- Gjermund Kittilsland
- Sigurd Moe
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
- University of Oslo
- University of South-Eastern Norway
- SensoNor ASA
Presented at
The 226th Meeting of the Electrochemical Society
Place
Cancun
Date
05.10.2014 - 09.10.2014
Organizer
The Electrochemical Society