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Dry-film resist technology for versatile TSV fabrication for MEMS, tested on blind dummy TSVs

Category

Academic lecture

Client

  • Research Council of Norway (RCN) / 210601

Language

English

Author(s)

Affiliation

  • SINTEF Digital / Microsystems and Nanotechnology

Presented at

DTIP

Place

Cannes

Date

01.04.2014 - 04.04.2014

Organizer

CMP

Year

2014

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