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Linear and Nonlinear State Estimation in the Czochralski Process

Abstract

The Czochralski process is the only method used commercially for production of monocrystalline silicon for semiconductor and solar cell applications. This paper explores the use of mathematical modeling as an aid in estimation of system state variables in the standard Czochralski process. A state-space model of the process is presented, describing the dynamics of the crystal radius and meniscus height with crystal radius as measured output. For the purpose of estimating the actual crystal radius during growth, three types of state estimators are developed based on the state-space model; the Kalman lter, the extended Kalman lter and the unscented Kalman lter. It is found that the latter two provide highly accurate state estimates with excellent noise suppression.

Category

Academic article

Client

  • Research Council of Norway (RCN) / 192427

Language

English

Author(s)

  • Parsa Rahmanpour
  • John Atle Bones
  • Morten Hovd
  • Jan Tommy Gravdahl

Affiliation

  • Norwegian University of Science and Technology
  • SINTEF Industry / Sustainable Energy Technology

Year

2013

Published in

Elsevier IFAC Publications / IFAC Proceedings series

ISSN

1474-6670

Publisher

Elsevier

Volume

10

Issue

1

Page(s)

523 - 528

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