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pMUT for high intensity focused ultrasound

Abstract

Capacitive ultrasonic tranducers, cMUTs rely on the electrostatic field between the membrane and a back plate for sensing andactuation. This is an excellent solution for small amplitudes. But the movement of the membrane is physically limited by the bottom plate (risk of collapse). Furthermore, pull-in and linearity considerations restrict the available range to about one percent of thegap. Piezoelectric micromachined ultrasonic transducers, pMUTs, on the other hand have no such restrictions. The excitation is basedon lateral contraction of a thin film of Lead Zirconate Titanate, PZT, deposited on top of the membrane. Then there is no need for abackplate, and the linear range is greatly increased. Therefore, pMUTs are ideally suited for applications demanding large excitationamplitude, such as high intensity focused ultrasound, HIFU. In this work, we present pMUTs designed for HIFU operation around 1MHz.

Category

Academic chapter/article/Conference paper

Client

  • EU / NMP2-SE-2009-229196

Language

English

Author(s)

  • An Nguyen-Dinh
  • Dag Thorstein Wang
  • Cyril Meynier
  • Frode Tyholdt
  • Andreas Vogl
  • Hannah Karin Kristin Rosquist Tofteberg
  • Niels Peter Østbø
  • E Flesch

Affiliation

  • France
  • SINTEF Digital / Microsystems and Nanotechnology

Year

2012

Publisher

IEEE conference proceedings

Book

2012 IEEE International Ultrasonics Symposium (IUS), Dresden, 7-10 Oct. 2012

Issue

.

ISBN

978-1-4673-4561-3

Page(s)

1 - - 5

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