Mirrors and Anti-Reflective Surfaces in Single Crystal Silicon by Patterning of the Silicon Surface
Category
Academic lecture
Language
English
Author(s)
- Sanja Hadzialic
- Maaike Margrete Visser Taklo
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
Presented at
Optical MEMS & Nanophotonics 2013
Place
Kanazawa
Date
18.08.2013 - 22.08.2013
Organizer
IEEE