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Mirrors and Anti-Reflective Surfaces in Single Crystal Silicon by Patterning of the Silicon Surface

Category

Academic lecture

Language

English

Author(s)

  • Sanja Hadzialic
  • Maaike Margrete Visser Taklo

Affiliation

  • SINTEF Digital / Microsystems and Nanotechnology
  • SINTEF Digital / Smart Sensor Systems

Presented at

Optical MEMS & Nanophotonics 2013

Place

Kanazawa

Date

18.08.2013 - 22.08.2013

Organizer

IEEE

Year

2013

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