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3D interconnect technologies for advanced MEMS/NEMS applications

Category

Academic lecture

Language

English

Author(s)

  • Nicolas Lietaer
  • Maaike Margrete Visser Taklo
  • Kari Schjølberg-Henriksen
  • Peter Ramm

Affiliation

  • SINTEF Digital / Microsystems and Nanotechnology
  • Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.

Presented at

216th Meeting of the Electrochemical Society

Place

Vienna

Date

04.10.2009 - 09.10.2009

Organizer

The Electrochemical Society

Year

2009

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