3D interconnect technologies for advanced MEMS/NEMS applications
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Category
Academic lecture
Language
English
Author(s)
- Nicolas Lietaer
- Maaike Margrete Visser Taklo
- Kari Schjølberg-Henriksen
- Peter Ramm
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
- Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Presented at
216th Meeting of the Electrochemical Society
Place
Vienna
Date
04.10.2009 - 09.10.2009
Organizer
The Electrochemical Society