Protection of MOS capacitors during anodic bonding

Category

Academic article

Language

English

Author(s)

Kari Schjølberg-Henriksen
Jose Antonio Plaza
Joan Marc Rafí
Jaume Esteve
Francesca Campabadal
Joaquín Santander
Geir Uri Jensen
Anders Hanneborg

Affiliation

SINTEF Digital / Smart Sensors and Microsystems
Centro Nacional de Microelectrónica

Year

2002

Published in

Journal of Micromechanics and Microengineering (JMM)

ISSN

0960-1317

Publisher

IOP Publishing

Volume

12

Issue

4

Page(s)

361 - 368

View this publication at Cristin