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Protection of MOS capacitors during anodic bonding

Category

Academic article

Language

English

Author(s)

  • Kari Schjølberg-Henriksen
  • Jose Antonio Plaza
  • Joan Marc Rafí
  • Jaume Esteve
  • Francesca Campabadal
  • Joaquín Santander
  • Geir Uri Jensen
  • Anders Hanneborg

Affiliation

  • SINTEF Digital / Microsystems and Nanotechnology
  • Centro Nacional de Microelectrónica

Year

2002

Published in

Journal of Micromechanics and Microengineering

ISSN

0960-1317

Publisher

Institute of Physics Publishing (IOP)

Volume

12

Issue

4

Page(s)

361 - 368

View this publication at Cristin