Sodium contamination of SiO2 caused by anodic bonding

Category

Academic article

Language

English

Author(s)

Kari Schjølberg-Henriksen
Geir Uri Jensen
Anders Hanneborg
Henrik Jakobsen

Affiliation

SINTEF Digital / Smart Sensors and Microsystems
University of South-Eastern Norway

Year

2003

Published in

Journal of Micromechanics and Microengineering (JMM)

ISSN

0960-1317

Publisher

IOP Publishing

Volume

13

Issue

6

Page(s)

845 - 852

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