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Sodium contamination of SiO2 caused by anodic bonding

Category

Academic article

Language

English

Author(s)

  • Kari Schjølberg-Henriksen
  • Geir Uri Jensen
  • Anders Hanneborg
  • Henrik Jakobsen

Affiliation

  • SINTEF Digital / Microsystems and Nanotechnology
  • University of South-Eastern Norway

Year

2003

Published in

Journal of Micromechanics and Microengineering

ISSN

0960-1317

Publisher

Institute of Physics Publishing (IOP)

Volume

13

Issue

6

Page(s)

845 - 852

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