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Sensitivity analyses of furnace material properties in the Czochralski crystal growth method for silicon

Sensitivity analyses of furnace material properties in the Czochralski crystal growth method for silicon

Category
Academic article
Abstract
Reliability of the numerical simulation results strongly depends on the input data, in particular on the thermo-physical properties of the furnace components, e.g. graphite thermal conductivity and steel surface emissivity. Uncertainties are always involved in the measurement of these parameters. A set of global 2D simulations has been carried out in order to investigate the impact of each property on the growth conditions in Czochralski silicon growth furnaces. The results indicate that steel emissivity and felt conductivity have significant impact on the calculated thermal field and energy consumption.
Language
English
Author(s)
Affiliation
  • Norwegian University of Science and Technology
  • SINTEF Industry
  • SINTEF Industry / Metal Production and Processing
Year
Published in
Measurement science and technology
ISSN
0957-0233
Publisher
Institute of Physics Publishing (IOP)
Volume
24
Issue
1