Improving UV Stability of SiO2/SiNx-Passivated Silicon Photodiodes Through Shallow Junction Implantation and Oxide Regrowth

Author(s)

• Michael Getz
• Ozhan Koybasi
• Fredrik Edhborg
• Ørnulf Nordseth
• Steven Hesse
• Tobias Pohl
• Marco Povoli
• Stefan Källberg
• Lutz Werner
• Erkki Ikonen
• Jarle Gran

Affiliation

• SINTEF Digital / Smart Sensors and Microsystems
• Aalto University
• RISE Research Institutes of Sweden
• Physikalisch-Technische Bundesanstalt
• Norwegian Metrology Service
• Institute for Energy Technology

Issue

13

DOI