Dielectric breakdown and reliability of thin film insulators for high-voltage microelectromechanical systems applications
Category
Academic article
Language
English
Author(s)
- Michael Getz
- Abélia Ellingsen
- Runar Dahl-Hansen
- Enrique Escobedo-Cousin
- Elizaveta Vereshchagina
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
Date
01.02.2026
Year
2026Published in
Thin Solid Films
ISSN
0040-6090
Volume
836
Page(s)
140876 - 140876
View this publication at Norwegian Research Information Repository