Monitoring selective etching of self-assembled nanostructured a-Si:Al films

Client

• Research Council of Norway (RCN) / 245963
• Research Council of Norway (RCN) / 197405
• Research Council of Norway (RCN) / 231658
• Research Council of Norway (RCN) / NORTEM 197405

Author(s)

• Torunn Kjeldstad
• Annett Thøgersen
• Marit Synnøve Sæverud Stange
• Alexander Azarov
• Eduard Monakhov
• Augustinas Galeckas

Affiliation

• University of Oslo
• SINTEF Industry / Sustainable Energy Technology

Issue

13

DOI

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