High-frequency 2D PZT based micromirrors
Category
Poster
Language
English
Author(s)
- Jo Gjessing
- Thor Bakke
- Zeljko Skokic
- Paul Wittendorp
- Aina Suphellen
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
- Unknown
Presented at
PiezoMEMS
Place
Orlando
Date
16.01.2018 - 18.01.2018