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High-frequency 2D PZT based micromirrors

High-frequency 2D PZT based micromirrors

Category
Conference lecture and academic presentation
Language
English
Author(s)
Affiliation
  • SINTEF Digital / Microsystems and Nanotechnology
Presented at
PiezoMEMS
Place
Orlando
Date
15.01.2018 - 17.01.2018
Year
2018