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2D PZT based micromirrors with high resonance frequency or high angular deflection

2D PZT based micromirrors with high resonance frequency or high angular deflection

Category
Conference lecture and academic presentation
Client
  • Norges forskningsråd / 282086
Language
English
Author(s)
Affiliation
  • SINTEF Digital / Microsystems and Nanotechnology
Presented at
Norsk Elektrooptikkonferanse
Place
Henningsvær
Date
01.05.2018 - 03.05.2018
Year
2018