Assessment of feature engineering and long short-term memory for structure loss identification from process data in monocrystalline silicon growth by the Czochralski method
Assessment of feature engineering and long short-term memory for structure loss identification from process data in monocrystalline silicon growth by the Czochralski method
Category
Report
Client
- Research Council of Norway (RCN) / 257639
Language
English
Affiliation
- Norwegian University of Science and Technology
- SINTEF Industry / Metal Production and Processing
Year
2019
Publisher
Department of Materials Science and Engineering, NTNU
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