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Assessment of feature engineering and long short-term memory for structure loss identification from process data in monocrystalline silicon growth by the Czochralski method

Assessment of feature engineering and long short-term memory for structure loss identification from process data in monocrystalline silicon growth by the Czochralski method

Category
Report
Client
  • Research Council of Norway (RCN) / 257639
Language
English
Author(s)
Affiliation
  • Norwegian University of Science and Technology
  • SINTEF Industry / Metal Production and Processing
Year
2019
Publisher
Department of Materials Science and Engineering, NTNU