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Statistical analysis of structure loss in Czochralski silicon growth

Statistical analysis of structure loss in Czochralski silicon growth

Category
Academic article
Client
  • Research Council of Norway (RCN) / 257639
Language
English
Author(s)
Affiliation
  • Norwegian University of Science and Technology
  • SINTEF Industry / Metal Production and Processing
Year
2019
Published in
AIP Conference Proceedings
ISSN
0094-243X
Publisher
American Institute of Physics (AIP)
Volume
2147
Issue
1