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Monitoring selective etching of self-assembled nanostructured a-Si:Al films

Monitoring selective etching of self-assembled nanostructured a-Si:Al films

Category
Academic article
Client
  • Research Council of Norway (RCN) / NORTEM 197405
  • Research Council of Norway (RCN) / 231658
  • Research Council of Norway (RCN) / 197405
  • Research Council of Norway (RCN) / 245963
Language
English
Author(s)
Affiliation
  • University of Oslo
  • SINTEF Industry / Sustainable Energy Technology
Year
2019
Published in
Nanotechnology
ISSN
0957-4484
Publisher
Institute of Physics Publishing (IOP)
Volume
30
Issue
13
Page(s)
1 - 5