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Growth of epitaxial PZT and PMN-PT for IDT electrodes on full wafer area by PLD for fabrication of energy harvesters

Growth of epitaxial PZT and PMN-PT for IDT electrodes on full wafer area by PLD for fabrication of energy harvesters

Category
Academic lecture
Client
  • Research Council of Norway (RCN) / 241887/O70
Language
English
Author(s)
Affiliation
  • SINTEF Digital / Microsystems and Nanotechnology
  • Unknown
Presented at
2018 PiezoMEMS Workshop
Place
Orlando
Date
15.01.2018 - 16.01.2018
Organizer
Oregon State University and US Army Research Laboratory
Year
2018
External resources