Chemical vapor deposition of silicon from silane: Review of growth mechanisms and modeling/scaleup of fluidized bed reactors

Author(s)

• Werner Olav Filtvedt
• Arve Holt
• P.A. Ramachandran
• Morten Christian Melaaen

Affiliation

• SINTEF Industry / Process Technology
• University of South-Eastern Norway
• Washington University, St. Louis
• Institute for Energy Technology

Issue

December

DOI