Characterization and Failure Analysis of 3D Integrated Systems using a novel plasma-FIB system
Category
Academic lecture
Language
English
Author(s)
- Laurens Kwakman
- German Franz
- Maaike Margrete Visser Taklo
- Armin Klumpp
- Peter Ramm
Affiliation
- Unknown
- SINTEF Digital / Smart Sensors and Microsystems
Presented at
International Conference on Frontiers of Characterization and Metrology for Nanoelectronics
Place
Grenoble
Date
23.05.2011 - 26.05.2011