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Publication

Next generation test equipment for micro-production

Category

Academic article

Language

English

Author(s)

  • Kay Gastinger
  • Lars Johnsen
  • Malgorzata Kujawinska
  • Michal Jozwik
  • Uwe Zeitner
  • Peter Dannberg
  • Jorge Albero
  • Sylwester Bargiel
  • Christoph Schaeffel
  • Stephan Beer
  • Rudolf Moosburger
  • Patrick Lamberlet
  • Marco Pizzi

Affiliation

  • SINTEF Digital / Smart Sensors and Microsystems
  • National Center for Scientific Research
  • Italy
  • Warsaw University of Technology
  • Switzerland
  • Swiss Center for Electronics and Microtechnology Inc.
  • Germany
  • Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.

Year

2010

Published in

Proceedings of SPIE, the International Society for Optical Engineering

ISSN

0277-786X

Volume

7718

DOI

https://doi.org/10.1117/12.855087

View this publication at Norwegian Research Information Repository