Norsk English
Publication

Anodic bonding

Category

Academic chapter

Language

English

Author(s)

  • Adriana Cozma Lapadatu
  • Kari Schjølberg-Henriksen

Affiliation

  • SINTEF Digital / Smart Sensors and Microsystems
  • SensoNor ASA

Year

2012

Publisher

Wiley-VCH

Book

Handbook of wafer bonding

ISBN

9783527326464

Page(s)

63 - 80

External resources

DOI

https://doi.org/10.1002/9783527644223.CH4

View this publication at Norwegian Research Information Repository