Handbook of wafer bonding
Category
Anthology
Language
English
Author(s)
- Peter Ramm
- James Jian-Qiang Lu
- Maaike Margrete Visser Taklo
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
- Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
- Rensselaer Polytechnic Institute
Year
2012Publisher
Wiley-VCH
ISBN
9783527326464
External resources
View this publication at Norwegian Research Information Repository