Tuning of Resist slope for RF MEMS with hard baking parameters
Category
Academic chapter/article/Conference paper
Language
English
Author(s)
- Shimul Chandra Saha
- Håkon Sagberg
- Geir uri Jensen
- Trond Sæther
Affiliation
- Norwegian University of Science and Technology
- Unknown
- SINTEF
Year
2006Publisher
International Microprocess and Nanotechnology Conference (MNC)
Book
Proceedings of the 19th International Microprocess and Nanotechnology Conference (MNC 2006
ISBN
4-9902472-3-X