To main content

Tuning of Resist slope for RF MEMS with hard baking parameters

Category

Academic chapter

Language

English

Author(s)

Affiliation

  • SINTEF
  • Norwegian University of Science and Technology

Year

2006

Publisher

International Microprocess and Nanotechnology Conference (MNC)

Book

Proceedings of the 19th International Microprocess and Nanotechnology Conference (MNC 2006

ISBN

9784990247232

View this publication at Norwegian Research Information Repository