Tuning of Resist slope for RF MEMS with hard baking parameters
Category
Academic chapter
Language
English
Author(s)
- Shimul Chandra Saha
- Håkon Sagberg
- Geir uri Jensen
- Trond Sæther
Affiliation
- SINTEF
- Norwegian University of Science and Technology
Year
2006Publisher
International Microprocess and Nanotechnology Conference (MNC)
Book
Proceedings of the 19th International Microprocess and Nanotechnology Conference (MNC 2006
ISBN
9784990247232
View this publication at Norwegian Research Information Repository