Modeling of Spring Constant and Pull-down Voltage of Non uniform RF MEMS Cantilever
Category
Academic chapter
Language
English
Author(s)
- Shimul Chandra Saha
- Ulrik Hanke
- Geir uri Jensen
- Trond Sæther
Affiliation
- SINTEF
- Norwegian University of Science and Technology
Year
2006Publisher
IEEE (Institute of Electrical and Electronics Engineers)
Book
Proceedings of the 2006 IEEE International Behavioral Modeling and Simulation Conference
ISBN
9780780397422
External resources
View this publication at Norwegian Research Information Repository