Transfer of silcon nitride to silicon by fusion bonding
Category
Academic chapter/article/Conference paper
Language
English
Author(s)
- Kjersti Midtbø
- Arne Rønnekleiv
- Preben Storås
Affiliation
- Norwegian University of Science and Technology
- SINTEF
Year
2005Publisher
IMAPS Nordic
Book
Proceedings of the IMAPS Nordic conference 2005
ISBN
9-999-99999-9
Page(s)
135 - 138