Transfer of silcon nitride to silicon by fusion bonding
Category
Academic chapter
Language
English
Author(s)
- Kjersti Midtbø
- Arne Rønnekleiv
- Preben Storås
Affiliation
- SINTEF
- Norwegian University of Science and Technology
Year
2005Publisher
IMAPS Nordic
Book
Proceedings of the IMAPS Nordic conference 2005
ISBN
9789999999991
Page(s)
135 - 138
View this publication at Norwegian Research Information Repository