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Transfer of silcon nitride to silicon by fusion bonding

Category

Academic chapter

Language

English

Author(s)

  • Kjersti Midtbø
  • Arne Rønnekleiv
  • Preben Storås

Affiliation

  • SINTEF
  • Norwegian University of Science and Technology

Year

2005

Publisher

IMAPS Nordic

Book

Proceedings of the IMAPS Nordic conference 2005

ISBN

9789999999991

Page(s)

135 - 138

View this publication at Norwegian Research Information Repository