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Capacitive differential pressure sensor for harsh environments

Category

Academic article

Language

English

Author(s)

  • Sigurd T. Moe
  • Kari Schjølberg-Henriksen
  • Dag Thorstein Wang
  • Eivind Lund
  • Jon Barratt Nysæther
  • Liv Furuberg
  • Maaike Margrete Visser Taklo
  • Truls Fallet
  • R. W. Bernstein

Affiliation

  • SINTEF Digital / Microsystems and Nanotechnology
  • University of Oslo
  • SINTEF Digital / Smart Sensor Systems
  • Unknown

Year

2000

Published in

Sensors and Actuators A-Physical

ISSN

0924-4247

Volume

83

Issue

1-3

Page(s)

30 - 33

View this publication at Cristin