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A comparative analysis of structural defect formation in Si+ implanted and then plasma hydrogenated and in H+ implanted crystalline silicon

Category

Academic article

Language

English

Author(s)

  • Heidi Nordmark
  • Alexander Ulyashin
  • John C Walmsley
  • Randi Holmestad

Affiliation

  • SINTEF
  • Norwegian University of Science and Technology

Year

2008

Published in

Solid State Phenomena

ISSN

1012-0394

Volume

131-133

Page(s)

309 - 315

View this publication at Norwegian Research Information Repository