Abstract
The development of high-quality solid-state photon sources is essential to nano-optics, quantum photonics and related fields. A key objective of this research area is to develop tunable photon sources that not only enhance the performance but also offer dynamic functionalities. However, the realization of compact and robust photon sources with precise and wide-range tunability remains a long-standing challenge. Moreover, the lack of an effective approach to integrate nanoscale photon sources with dynamic systems has hindered tunability beyond mere spectral adjustments, such as simultaneous polarization control. Here we propose a platform based on quantum-emitter-embedded metasurfaces (QEMS) integrated with a micro-electromechanical system (MEMS)-positioned microcavity, enabling on-chip multidegree control of solid-state photon sources. Using MEMS–QEMS, we show that typically broadband room-temperature emission from nanodiamonds containing nitrogen-vacancy centres can be narrowed to 3.7 nm and dynamically tuned with ångström resolution. Furthermore, we design a wavelength–polarization-multiplexed QEMS and demonstrate polarization-resolved control of the MEMS–QEMS emission in a wide wavelength range (650–700 nm) along with polarization switching at submillisecond timescales. We believe that the proposed MEMS–QEMS platform can be adapted for most existing quantum emitters, significantly expanding their room-temperature capabilities and thereby enhancing their potential for advanced photonic applications.