Investigation of OH groups uniformity in fused quartz crucibles used for Czochralski silicon production
Category
Lecture
Language
English
Author(s)
- Gabriela Kazimiera Warden
- Petra Ebbinghaus
- Martin Rabe
- Mari Juel
- Bartlomiej Adam Gawel
- Andreas Erbe
- Marisa Di Sabatino
Affiliation
- Norwegian University of Science and Technology
- Unknown
- SINTEF Industry / Sustainable Energy Technology
Presented at
NSCC
Date
22.05.2023 - 23.05.2023