Modeling of Spring Constant and Pull-down Voltage of Non uniform RF MEMS Cantilever
Category
Academic lecture
Language
English
Author(s)
- Shimul Chandra Saha
- Ulrik Hanke
- Geir uri Jensen
- Trond Sæther
Affiliation
- Norwegian University of Science and Technology
- SINTEF
Presented at
IEEE International Behavioral Modeling and Simulation Confer
Place
San Jose, California, USA
Date
14.09.2006
Organizer
IEEE